9/5/2010	11:05:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2010	11:05:30 AM	Recipe started at 11:05 AM
9/5/2010	11:05:30 AM	H2 valve closed
9/5/2010	11:05:30 AM	BCl3 valve closed
9/5/2010	11:05:30 AM	PH3 valve closed
9/5/2010	11:05:30 AM	SiCl4 pre valve closed
9/5/2010	11:05:30 AM	SiCl4 post valve closed
9/5/2010	11:05:30 AM	Main Vac valve closed
9/5/2010	11:05:30 AM	Bypass valve closed
9/5/2010	11:05:30 AM	Bubbler valve closed
9/5/2010	11:05:30 AM	Helium valve opened
9/5/2010	11:05:30 AM	Helium MFC set to  500.000000
9/5/2010	11:05:30 AM	H2 MFC set to  0.000000
9/5/2010	11:05:30 AM	BCl3 MFC set to  0.000000
9/5/2010	11:05:30 AM	PHl3 MFC set to  0.000000
9/5/2010	11:05:30 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:05:30 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:05:30 AM	Tube furnace set to 0
9/5/2010	11:06:50 AM	Helium valve closed
9/5/2010	11:06:50 AM	H2 valve closed
9/5/2010	11:06:50 AM	BCl3 valve closed
9/5/2010	11:06:50 AM	PH3 valve closed
9/5/2010	11:06:50 AM	SiCl4 pre valve closed
9/5/2010	11:06:50 AM	SiCl4 post valve closed
9/5/2010	11:06:50 AM	Main Vac valve closed
9/5/2010	11:06:50 AM	Bypass valve closed
9/5/2010	11:06:50 AM	Bubbler valve closed
9/5/2010	11:06:50 AM	Helium MFC set to  0.000000
9/5/2010	11:06:50 AM	H2 MFC set to  0.000000
9/5/2010	11:06:50 AM	BCl3 MFC set to  0.000000
9/5/2010	11:06:50 AM	PHl3 MFC set to  0.000000
9/5/2010	11:06:50 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:06:50 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:06:50 AM	Tube furnace set to 0
9/5/2010	11:06:50 AM	Run finished at 11:06 AM
9/5/2010	11:06:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2010	11:16:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	11:16:06 AM	Recipe started at 11:16 AM
9/5/2010	11:16:06 AM	Helium valve closed
9/5/2010	11:16:06 AM	H2 valve closed
9/5/2010	11:16:06 AM	BCl3 valve closed
9/5/2010	11:16:06 AM	PH3 valve closed
9/5/2010	11:16:06 AM	SiCl4 pre valve closed
9/5/2010	11:16:06 AM	SiCl4 post valve closed
9/5/2010	11:16:06 AM	Main Vac valve closed
9/5/2010	11:16:06 AM	Bubbler valve closed
9/5/2010	11:16:06 AM	Bypass valve opened
9/5/2010	11:16:06 AM	Helium MFC set to  0.000000
9/5/2010	11:16:06 AM	H2 MFC set to  0.000000
9/5/2010	11:16:06 AM	BCl3 MFC set to  0.000000
9/5/2010	11:16:06 AM	PHl3 MFC set to  0.000000
9/5/2010	11:16:06 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:16:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:16:06 AM	Tube furnace set to 0
9/5/2010	11:16:46 AM	Helium valve closed
9/5/2010	11:16:46 AM	H2 valve closed
9/5/2010	11:16:46 AM	BCl3 valve closed
9/5/2010	11:16:46 AM	PH3 valve closed
9/5/2010	11:16:46 AM	SiCl4 pre valve closed
9/5/2010	11:16:46 AM	SiCl4 post valve closed
9/5/2010	11:16:46 AM	Bubbler valve closed
9/5/2010	11:16:46 AM	Main Vac valve opened
9/5/2010	11:16:46 AM	Bypass valve opened
9/5/2010	11:16:46 AM	Helium MFC set to  0.000000
9/5/2010	11:16:46 AM	H2 MFC set to  0.000000
9/5/2010	11:16:46 AM	BCl3 MFC set to  0.000000
9/5/2010	11:16:46 AM	PHl3 MFC set to  0.000000
9/5/2010	11:16:46 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:16:46 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:16:46 AM	Tube furnace set to 0
9/5/2010	11:16:46 AM	Run finished at 11:16 AM
9/5/2010	11:16:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	11:21:48 AM	Bypass valve closed
9/5/2010	11:21:50 AM	Main Vac valve closed
9/5/2010	11:22:13 AM	Main Vac valve opened
9/5/2010	11:22:21 AM	Bypass valve opened
9/5/2010	11:22:40 AM	Tube furnace set to 80
9/5/2010	11:23:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
9/5/2010	11:23:30 AM	Recipe started at 11:23 AM
9/5/2010	11:23:30 AM	H2 valve closed
9/5/2010	11:23:30 AM	BCl3 valve closed
9/5/2010	11:23:30 AM	PH3 valve closed
9/5/2010	11:23:30 AM	SiCl4 pre valve closed
9/5/2010	11:23:30 AM	SiCl4 post valve closed
9/5/2010	11:23:30 AM	Main Vac valve closed
9/5/2010	11:23:30 AM	Bypass valve closed
9/5/2010	11:23:30 AM	Bubbler valve closed
9/5/2010	11:23:30 AM	Helium valve opened
9/5/2010	11:23:30 AM	Helium MFC set to  500.000000
9/5/2010	11:23:30 AM	H2 MFC set to  0.000000
9/5/2010	11:23:30 AM	BCl3 MFC set to  0.000000
9/5/2010	11:23:30 AM	PHl3 MFC set to  0.000000
9/5/2010	11:23:30 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:23:30 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:23:30 AM	Tube furnace set to 0
9/5/2010	11:24:51 AM	Helium valve closed
9/5/2010	11:24:51 AM	H2 valve closed
9/5/2010	11:24:51 AM	BCl3 valve closed
9/5/2010	11:24:51 AM	PH3 valve closed
9/5/2010	11:24:51 AM	SiCl4 pre valve closed
9/5/2010	11:24:51 AM	SiCl4 post valve closed
9/5/2010	11:24:51 AM	Main Vac valve closed
9/5/2010	11:24:51 AM	Bypass valve closed
9/5/2010	11:24:51 AM	Bubbler valve closed
9/5/2010	11:24:51 AM	Helium MFC set to  0.000000
9/5/2010	11:24:51 AM	H2 MFC set to  0.000000
9/5/2010	11:24:51 AM	BCl3 MFC set to  0.000000
9/5/2010	11:24:51 AM	PHl3 MFC set to  0.000000
9/5/2010	11:24:51 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:24:51 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:24:51 AM	Tube furnace set to 0
9/5/2010	11:25:06 AM	Helium valve closed
9/5/2010	11:25:06 AM	H2 valve closed
9/5/2010	11:25:06 AM	BCl3 valve closed
9/5/2010	11:25:06 AM	PH3 valve closed
9/5/2010	11:25:06 AM	SiCl4 pre valve closed
9/5/2010	11:25:06 AM	SiCl4 post valve closed
9/5/2010	11:25:06 AM	Main Vac valve closed
9/5/2010	11:25:06 AM	Bubbler valve closed
9/5/2010	11:25:06 AM	Bypass valve opened
9/5/2010	11:25:06 AM	Helium MFC set to  0.000000
9/5/2010	11:25:06 AM	H2 MFC set to  0.000000
9/5/2010	11:25:06 AM	BCl3 MFC set to  0.000000
9/5/2010	11:25:06 AM	PHl3 MFC set to  0.000000
9/5/2010	11:25:06 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:25:06 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:25:06 AM	Tube furnace set to 0
9/5/2010	11:25:35 AM	Helium valve closed
9/5/2010	11:25:35 AM	H2 valve closed
9/5/2010	11:25:35 AM	BCl3 valve closed
9/5/2010	11:25:35 AM	PH3 valve closed
9/5/2010	11:25:35 AM	SiCl4 pre valve closed
9/5/2010	11:25:35 AM	SiCl4 post valve closed
9/5/2010	11:25:35 AM	Bubbler valve closed
9/5/2010	11:25:35 AM	Main Vac valve opened
9/5/2010	11:25:35 AM	Bypass valve opened
9/5/2010	11:25:35 AM	Helium MFC set to  0.000000
9/5/2010	11:25:35 AM	H2 MFC set to  0.000000
9/5/2010	11:25:35 AM	BCl3 MFC set to  0.000000
9/5/2010	11:25:35 AM	PHl3 MFC set to  0.000000
9/5/2010	11:25:35 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:25:35 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:25:35 AM	Tube furnace set to 0
9/5/2010	11:30:35 AM	H2 valve closed
9/5/2010	11:30:35 AM	BCl3 valve closed
9/5/2010	11:30:35 AM	PH3 valve closed
9/5/2010	11:30:35 AM	SiCl4 pre valve closed
9/5/2010	11:30:35 AM	SiCl4 post valve closed
9/5/2010	11:30:35 AM	Main Vac valve closed
9/5/2010	11:30:35 AM	Bypass valve closed
9/5/2010	11:30:35 AM	Bubbler valve closed
9/5/2010	11:30:35 AM	Helium valve opened
9/5/2010	11:30:35 AM	Helium MFC set to  500.000000
9/5/2010	11:30:35 AM	H2 MFC set to  0.000000
9/5/2010	11:30:35 AM	BCl3 MFC set to  0.000000
9/5/2010	11:30:35 AM	PHl3 MFC set to  0.000000
9/5/2010	11:30:35 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:30:35 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:30:35 AM	Tube furnace set to 0
9/5/2010	11:31:55 AM	Helium valve closed
9/5/2010	11:31:55 AM	H2 valve closed
9/5/2010	11:31:55 AM	BCl3 valve closed
9/5/2010	11:31:55 AM	PH3 valve closed
9/5/2010	11:31:55 AM	SiCl4 pre valve closed
9/5/2010	11:31:55 AM	SiCl4 post valve closed
9/5/2010	11:31:55 AM	Main Vac valve closed
9/5/2010	11:31:55 AM	Bypass valve closed
9/5/2010	11:31:55 AM	Bubbler valve closed
9/5/2010	11:31:55 AM	Helium MFC set to  0.000000
9/5/2010	11:31:55 AM	H2 MFC set to  0.000000
9/5/2010	11:31:55 AM	BCl3 MFC set to  0.000000
9/5/2010	11:31:55 AM	PHl3 MFC set to  0.000000
9/5/2010	11:31:55 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:31:55 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:31:56 AM	Tube furnace set to 0
9/5/2010	11:32:11 AM	Helium valve closed
9/5/2010	11:32:11 AM	H2 valve closed
9/5/2010	11:32:11 AM	BCl3 valve closed
9/5/2010	11:32:11 AM	PH3 valve closed
9/5/2010	11:32:11 AM	SiCl4 pre valve closed
9/5/2010	11:32:11 AM	SiCl4 post valve closed
9/5/2010	11:32:11 AM	Main Vac valve closed
9/5/2010	11:32:11 AM	Bubbler valve closed
9/5/2010	11:32:11 AM	Bypass valve opened
9/5/2010	11:32:11 AM	Helium MFC set to  0.000000
9/5/2010	11:32:11 AM	H2 MFC set to  0.000000
9/5/2010	11:32:11 AM	BCl3 MFC set to  0.000000
9/5/2010	11:32:11 AM	PHl3 MFC set to  0.000000
9/5/2010	11:32:11 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:32:11 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:32:11 AM	Tube furnace set to 0
9/5/2010	11:32:40 AM	Helium valve closed
9/5/2010	11:32:40 AM	H2 valve closed
9/5/2010	11:32:40 AM	BCl3 valve closed
9/5/2010	11:32:40 AM	PH3 valve closed
9/5/2010	11:32:40 AM	SiCl4 pre valve closed
9/5/2010	11:32:40 AM	SiCl4 post valve closed
9/5/2010	11:32:40 AM	Bubbler valve closed
9/5/2010	11:32:40 AM	Main Vac valve opened
9/5/2010	11:32:40 AM	Bypass valve opened
9/5/2010	11:32:40 AM	Helium MFC set to  0.000000
9/5/2010	11:32:40 AM	H2 MFC set to  0.000000
9/5/2010	11:32:40 AM	BCl3 MFC set to  0.000000
9/5/2010	11:32:40 AM	PHl3 MFC set to  0.000000
9/5/2010	11:32:40 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:32:40 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:32:40 AM	Tube furnace set to 0
9/5/2010	11:37:40 AM	H2 valve closed
9/5/2010	11:37:40 AM	BCl3 valve closed
9/5/2010	11:37:40 AM	PH3 valve closed
9/5/2010	11:37:40 AM	SiCl4 pre valve closed
9/5/2010	11:37:40 AM	SiCl4 post valve closed
9/5/2010	11:37:40 AM	Main Vac valve closed
9/5/2010	11:37:40 AM	Bypass valve closed
9/5/2010	11:37:40 AM	Bubbler valve closed
9/5/2010	11:37:40 AM	Helium valve opened
9/5/2010	11:37:40 AM	Helium MFC set to  500.000000
9/5/2010	11:37:40 AM	H2 MFC set to  0.000000
9/5/2010	11:37:40 AM	BCl3 MFC set to  0.000000
9/5/2010	11:37:40 AM	PHl3 MFC set to  0.000000
9/5/2010	11:37:40 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:37:40 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:37:40 AM	Tube furnace set to 0
9/5/2010	11:39:01 AM	Helium valve closed
9/5/2010	11:39:01 AM	H2 valve closed
9/5/2010	11:39:01 AM	BCl3 valve closed
9/5/2010	11:39:01 AM	PH3 valve closed
9/5/2010	11:39:01 AM	SiCl4 pre valve closed
9/5/2010	11:39:01 AM	SiCl4 post valve closed
9/5/2010	11:39:01 AM	Main Vac valve closed
9/5/2010	11:39:01 AM	Bypass valve closed
9/5/2010	11:39:01 AM	Bubbler valve closed
9/5/2010	11:39:01 AM	Helium MFC set to  0.000000
9/5/2010	11:39:01 AM	H2 MFC set to  0.000000
9/5/2010	11:39:01 AM	BCl3 MFC set to  0.000000
9/5/2010	11:39:01 AM	PHl3 MFC set to  0.000000
9/5/2010	11:39:01 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:39:01 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:39:01 AM	Tube furnace set to 0
9/5/2010	11:39:16 AM	Helium valve closed
9/5/2010	11:39:16 AM	H2 valve closed
9/5/2010	11:39:16 AM	BCl3 valve closed
9/5/2010	11:39:16 AM	PH3 valve closed
9/5/2010	11:39:16 AM	SiCl4 pre valve closed
9/5/2010	11:39:16 AM	SiCl4 post valve closed
9/5/2010	11:39:16 AM	Main Vac valve closed
9/5/2010	11:39:16 AM	Bubbler valve closed
9/5/2010	11:39:16 AM	Bypass valve opened
9/5/2010	11:39:16 AM	Helium MFC set to  0.000000
9/5/2010	11:39:16 AM	H2 MFC set to  0.000000
9/5/2010	11:39:16 AM	BCl3 MFC set to  0.000000
9/5/2010	11:39:16 AM	PHl3 MFC set to  0.000000
9/5/2010	11:39:16 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:39:16 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:39:16 AM	Tube furnace set to 0
9/5/2010	11:39:45 AM	Helium valve closed
9/5/2010	11:39:45 AM	H2 valve closed
9/5/2010	11:39:45 AM	BCl3 valve closed
9/5/2010	11:39:45 AM	PH3 valve closed
9/5/2010	11:39:45 AM	SiCl4 pre valve closed
9/5/2010	11:39:45 AM	SiCl4 post valve closed
9/5/2010	11:39:45 AM	Bubbler valve closed
9/5/2010	11:39:45 AM	Main Vac valve opened
9/5/2010	11:39:45 AM	Bypass valve opened
9/5/2010	11:39:45 AM	Helium MFC set to  0.000000
9/5/2010	11:39:45 AM	H2 MFC set to  0.000000
9/5/2010	11:39:45 AM	BCl3 MFC set to  0.000000
9/5/2010	11:39:45 AM	PHl3 MFC set to  0.000000
9/5/2010	11:39:45 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:39:45 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:39:45 AM	Tube furnace set to 0
9/5/2010	11:44:45 AM	Helium valve closed
9/5/2010	11:44:45 AM	H2 valve closed
9/5/2010	11:44:45 AM	BCl3 valve closed
9/5/2010	11:44:45 AM	PH3 valve closed
9/5/2010	11:44:45 AM	SiCl4 pre valve closed
9/5/2010	11:44:45 AM	SiCl4 post valve closed
9/5/2010	11:44:45 AM	Bubbler valve closed
9/5/2010	11:44:45 AM	Main Vac valve opened
9/5/2010	11:44:45 AM	Bypass valve opened
9/5/2010	11:44:45 AM	Helium MFC set to  0.000000
9/5/2010	11:44:45 AM	H2 MFC set to  0.000000
9/5/2010	11:44:45 AM	BCl3 MFC set to  0.000000
9/5/2010	11:44:45 AM	PHl3 MFC set to  0.000000
9/5/2010	11:44:45 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:44:45 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:44:45 AM	Tube furnace set to 0
9/5/2010	11:44:46 AM	Run finished at 11:44 AM
9/5/2010	11:44:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
9/5/2010	11:51:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	11:51:43 AM	Recipe started at 11:51 AM
9/5/2010	11:51:43 AM	Helium valve closed
9/5/2010	11:51:43 AM	H2 valve closed
9/5/2010	11:51:43 AM	BCl3 valve closed
9/5/2010	11:51:43 AM	PH3 valve closed
9/5/2010	11:51:43 AM	SiCl4 pre valve closed
9/5/2010	11:51:43 AM	SiCl4 post valve closed
9/5/2010	11:51:43 AM	Main Vac valve closed
9/5/2010	11:51:43 AM	Bubbler valve closed
9/5/2010	11:51:43 AM	Bypass valve opened
9/5/2010	11:51:43 AM	Helium MFC set to  0.000000
9/5/2010	11:51:43 AM	H2 MFC set to  0.000000
9/5/2010	11:51:43 AM	BCl3 MFC set to  0.000000
9/5/2010	11:51:43 AM	PHl3 MFC set to  0.000000
9/5/2010	11:51:43 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:51:43 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:51:43 AM	Tube furnace set to 0
9/5/2010	11:51:43 AM	Helium valve closed
9/5/2010	11:51:43 AM	H2 valve closed
9/5/2010	11:51:43 AM	BCl3 valve closed
9/5/2010	11:51:43 AM	PH3 valve closed
9/5/2010	11:51:43 AM	SiCl4 pre valve closed
9/5/2010	11:51:43 AM	SiCl4 post valve closed
9/5/2010	11:51:43 AM	Bubbler valve closed
9/5/2010	11:51:43 AM	Main Vac valve opened
9/5/2010	11:51:43 AM	Bypass valve opened
9/5/2010	11:51:43 AM	Helium MFC set to  0.000000
9/5/2010	11:51:43 AM	H2 MFC set to  0.000000
9/5/2010	11:51:43 AM	BCl3 MFC set to  0.000000
9/5/2010	11:51:43 AM	PHl3 MFC set to  0.000000
9/5/2010	11:51:43 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:51:43 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:51:43 AM	Tube furnace set to 0
9/5/2010	11:52:44 AM	H2 valve closed
9/5/2010	11:52:44 AM	BCl3 valve closed
9/5/2010	11:52:44 AM	PH3 valve closed
9/5/2010	11:52:44 AM	SiCl4 pre valve closed
9/5/2010	11:52:44 AM	SiCl4 post valve closed
9/5/2010	11:52:44 AM	Bubbler valve closed
9/5/2010	11:52:44 AM	Helium valve opened
9/5/2010	11:52:44 AM	Main Vac valve opened
9/5/2010	11:52:44 AM	Bypass valve opened
9/5/2010	11:52:44 AM	Helium MFC set to  100.000000
9/5/2010	11:52:44 AM	H2 MFC set to  0.000000
9/5/2010	11:52:44 AM	BCl3 MFC set to  0.000000
9/5/2010	11:52:44 AM	PHl3 MFC set to  0.000000
9/5/2010	11:52:44 AM	SiCl4 MFC set to  0.000000
9/5/2010	11:52:44 AM	Bypass solenoid MFC set to  0.000000
9/5/2010	11:52:44 AM	Tube furnace set to 0
9/5/2010	12:01:44 PM	Helium valve closed
9/5/2010	12:01:44 PM	H2 valve closed
9/5/2010	12:01:44 PM	BCl3 valve closed
9/5/2010	12:01:44 PM	PH3 valve closed
9/5/2010	12:01:44 PM	SiCl4 pre valve closed
9/5/2010	12:01:44 PM	SiCl4 post valve closed
9/5/2010	12:01:44 PM	Bubbler valve closed
9/5/2010	12:01:44 PM	Main Vac valve opened
9/5/2010	12:01:44 PM	Bypass valve opened
9/5/2010	12:01:44 PM	Helium MFC set to  0.000000
9/5/2010	12:01:44 PM	H2 MFC set to  0.000000
9/5/2010	12:01:44 PM	BCl3 MFC set to  0.000000
9/5/2010	12:01:44 PM	PHl3 MFC set to  0.000000
9/5/2010	12:01:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	12:01:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	12:01:44 PM	Tube furnace set to 0
9/5/2010	12:02:44 PM	H2 valve closed
9/5/2010	12:02:44 PM	BCl3 valve closed
9/5/2010	12:02:44 PM	PH3 valve closed
9/5/2010	12:02:44 PM	SiCl4 pre valve closed
9/5/2010	12:02:44 PM	SiCl4 post valve closed
9/5/2010	12:02:44 PM	Bubbler valve closed
9/5/2010	12:02:44 PM	Helium valve opened
9/5/2010	12:02:44 PM	Main Vac valve opened
9/5/2010	12:02:44 PM	Bypass valve opened
9/5/2010	12:02:44 PM	Helium MFC set to  100.000000
9/5/2010	12:02:44 PM	H2 MFC set to  0.000000
9/5/2010	12:02:44 PM	BCl3 MFC set to  0.000000
9/5/2010	12:02:44 PM	PHl3 MFC set to  0.000000
9/5/2010	12:02:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	12:02:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	12:02:44 PM	Tube furnace set to 0
9/5/2010	12:11:44 PM	Helium valve closed
9/5/2010	12:11:44 PM	H2 valve closed
9/5/2010	12:11:44 PM	BCl3 valve closed
9/5/2010	12:11:44 PM	PH3 valve closed
9/5/2010	12:11:44 PM	SiCl4 pre valve closed
9/5/2010	12:11:44 PM	SiCl4 post valve closed
9/5/2010	12:11:44 PM	Bubbler valve closed
9/5/2010	12:11:44 PM	Main Vac valve opened
9/5/2010	12:11:44 PM	Bypass valve opened
9/5/2010	12:11:44 PM	Helium MFC set to  0.000000
9/5/2010	12:11:44 PM	H2 MFC set to  0.000000
9/5/2010	12:11:44 PM	BCl3 MFC set to  0.000000
9/5/2010	12:11:44 PM	PHl3 MFC set to  0.000000
9/5/2010	12:11:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	12:11:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	12:11:44 PM	Tube furnace set to 0
9/5/2010	12:12:44 PM	H2 valve closed
9/5/2010	12:12:44 PM	BCl3 valve closed
9/5/2010	12:12:44 PM	PH3 valve closed
9/5/2010	12:12:44 PM	SiCl4 pre valve closed
9/5/2010	12:12:44 PM	SiCl4 post valve closed
9/5/2010	12:12:44 PM	Bubbler valve closed
9/5/2010	12:12:44 PM	Helium valve opened
9/5/2010	12:12:44 PM	Main Vac valve opened
9/5/2010	12:12:44 PM	Bypass valve opened
9/5/2010	12:12:44 PM	Helium MFC set to  100.000000
9/5/2010	12:12:44 PM	H2 MFC set to  0.000000
9/5/2010	12:12:44 PM	BCl3 MFC set to  0.000000
9/5/2010	12:12:44 PM	PHl3 MFC set to  0.000000
9/5/2010	12:12:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	12:12:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	12:12:45 PM	Tube furnace set to 0
9/5/2010	12:21:45 PM	Helium valve closed
9/5/2010	12:21:45 PM	H2 valve closed
9/5/2010	12:21:45 PM	BCl3 valve closed
9/5/2010	12:21:45 PM	PH3 valve closed
9/5/2010	12:21:45 PM	SiCl4 pre valve closed
9/5/2010	12:21:45 PM	SiCl4 post valve closed
9/5/2010	12:21:45 PM	Bubbler valve closed
9/5/2010	12:21:45 PM	Main Vac valve opened
9/5/2010	12:21:45 PM	Bypass valve opened
9/5/2010	12:21:45 PM	Helium MFC set to  0.000000
9/5/2010	12:21:45 PM	H2 MFC set to  0.000000
9/5/2010	12:21:45 PM	BCl3 MFC set to  0.000000
9/5/2010	12:21:45 PM	PHl3 MFC set to  0.000000
9/5/2010	12:21:45 PM	SiCl4 MFC set to  0.000000
9/5/2010	12:21:45 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	12:21:45 PM	Tube furnace set to 0
9/5/2010	12:21:46 PM	Run finished at 12:21 PM
9/5/2010	12:21:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	1:26:22 PM	Recipe started at 1:26 PM
9/5/2010	1:26:22 PM	Helium valve closed
9/5/2010	1:26:22 PM	BCl3 valve closed
9/5/2010	1:26:22 PM	PH3 valve closed
9/5/2010	1:26:22 PM	SiCl4 pre valve closed
9/5/2010	1:26:22 PM	SiCl4 post valve closed
9/5/2010	1:26:22 PM	Main Vac valve closed
9/5/2010	1:26:22 PM	Bypass valve closed
9/5/2010	1:26:22 PM	Bubbler valve closed
9/5/2010	1:26:22 PM	H2 valve opened
9/5/2010	1:26:22 PM	Helium MFC set to  0.000000
9/5/2010	1:26:22 PM	H2 MFC set to  500.000000
9/5/2010	1:26:22 PM	BCl3 MFC set to  0.000000
9/5/2010	1:26:22 PM	PHl3 MFC set to  0.000000
9/5/2010	1:26:22 PM	SiCl4 MFC set to  0.000000
9/5/2010	1:26:22 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	1:26:22 PM	Tube furnace set to 0
9/5/2010	1:27:44 PM	Helium valve closed
9/5/2010	1:27:44 PM	BCl3 valve closed
9/5/2010	1:27:44 PM	PH3 valve closed
9/5/2010	1:27:44 PM	SiCl4 pre valve closed
9/5/2010	1:27:44 PM	SiCl4 post valve closed
9/5/2010	1:27:44 PM	Main Vac valve closed
9/5/2010	1:27:44 PM	Bypass valve closed
9/5/2010	1:27:44 PM	H2 valve opened
9/5/2010	1:27:44 PM	Bubbler valve opened
9/5/2010	1:27:44 PM	Helium MFC set to  0.000000
9/5/2010	1:27:44 PM	H2 MFC set to  500.000000
9/5/2010	1:27:44 PM	BCl3 MFC set to  0.000000
9/5/2010	1:27:44 PM	PHl3 MFC set to  0.000000
9/5/2010	1:27:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	1:27:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	1:27:44 PM	Tube furnace set to 1000
9/5/2010	1:47:44 PM	Helium valve closed
9/5/2010	1:47:44 PM	BCl3 valve closed
9/5/2010	1:47:44 PM	Main Vac valve closed
9/5/2010	1:47:44 PM	Bypass valve closed
9/5/2010	1:47:44 PM	H2 valve opened
9/5/2010	1:47:44 PM	PH3 valve opened
9/5/2010	1:47:44 PM	SiCl4 pre valve opened
9/5/2010	1:47:44 PM	SiCl4 post valve opened
9/5/2010	1:47:44 PM	Bubbler valve opened
9/5/2010	1:47:44 PM	Helium MFC set to  0.000000
9/5/2010	1:47:44 PM	H2 MFC set to  500.000000
9/5/2010	1:47:44 PM	BCl3 MFC set to  0.000000
9/5/2010	1:47:44 PM	PHl3 MFC set to  1.000000
9/5/2010	1:47:44 PM	SiCl4 MFC set to  50.000000
9/5/2010	1:47:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	1:47:44 PM	Tube furnace set to 1000
9/5/2010	2:07:44 PM	H2 valve closed
9/5/2010	2:07:44 PM	BCl3 valve closed
9/5/2010	2:07:44 PM	PH3 valve closed
9/5/2010	2:07:44 PM	SiCl4 pre valve closed
9/5/2010	2:07:44 PM	SiCl4 post valve closed
9/5/2010	2:07:44 PM	Main Vac valve closed
9/5/2010	2:07:44 PM	Bypass valve closed
9/5/2010	2:07:44 PM	Helium valve opened
9/5/2010	2:07:44 PM	Bubbler valve opened
9/5/2010	2:07:44 PM	Helium MFC set to  500.000000
9/5/2010	2:07:44 PM	H2 MFC set to  0.000000
9/5/2010	2:07:44 PM	BCl3 MFC set to  0.000000
9/5/2010	2:07:44 PM	PHl3 MFC set to  0.000000
9/5/2010	2:07:44 PM	SiCl4 MFC set to  0.000000
9/5/2010	2:07:44 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	2:07:45 PM	Tube furnace set to 0
9/5/2010	2:27:45 PM	Helium valve closed
9/5/2010	2:27:45 PM	H2 valve closed
9/5/2010	2:27:45 PM	BCl3 valve closed
9/5/2010	2:27:45 PM	PH3 valve closed
9/5/2010	2:27:45 PM	SiCl4 pre valve closed
9/5/2010	2:27:45 PM	SiCl4 post valve closed
9/5/2010	2:27:45 PM	Main Vac valve closed
9/5/2010	2:27:45 PM	Bypass valve closed
9/5/2010	2:27:45 PM	Bubbler valve closed
9/5/2010	2:27:45 PM	Helium MFC set to  0.000000
9/5/2010	2:27:45 PM	H2 MFC set to  0.000000
9/5/2010	2:27:45 PM	BCl3 MFC set to  0.000000
9/5/2010	2:27:45 PM	PHl3 MFC set to  0.000000
9/5/2010	2:27:45 PM	SiCl4 MFC set to  0.000000
9/5/2010	2:27:45 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	2:27:45 PM	Tube furnace set to 0
9/5/2010	2:27:45 PM	Run finished at 2:27 PM
9/5/2010	2:56:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2010	2:56:55 PM	Recipe started at 2:56 PM
9/5/2010	2:56:55 PM	H2 valve closed
9/5/2010	2:56:55 PM	BCl3 valve closed
9/5/2010	2:56:55 PM	PH3 valve closed
9/5/2010	2:56:55 PM	SiCl4 pre valve closed
9/5/2010	2:56:55 PM	SiCl4 post valve closed
9/5/2010	2:56:55 PM	Main Vac valve closed
9/5/2010	2:56:55 PM	Bypass valve closed
9/5/2010	2:56:55 PM	Bubbler valve closed
9/5/2010	2:56:55 PM	Helium valve opened
9/5/2010	2:56:55 PM	Helium MFC set to  500.000000
9/5/2010	2:56:55 PM	H2 MFC set to  0.000000
9/5/2010	2:56:55 PM	BCl3 MFC set to  0.000000
9/5/2010	2:56:55 PM	PHl3 MFC set to  0.000000
9/5/2010	2:56:55 PM	SiCl4 MFC set to  0.000000
9/5/2010	2:56:55 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	2:56:55 PM	Tube furnace set to 0
9/5/2010	2:57:04 PM	Helium valve closed
9/5/2010	2:57:04 PM	H2 valve closed
9/5/2010	2:57:04 PM	BCl3 valve closed
9/5/2010	2:57:04 PM	PH3 valve closed
9/5/2010	2:57:04 PM	SiCl4 pre valve closed
9/5/2010	2:57:04 PM	SiCl4 post valve closed
9/5/2010	2:57:04 PM	Main Vac valve closed
9/5/2010	2:57:04 PM	Bypass valve closed
9/5/2010	2:57:04 PM	Bubbler valve closed
9/5/2010	2:57:04 PM	Helium MFC set to  0.000000
9/5/2010	2:57:04 PM	H2 MFC set to  0.000000
9/5/2010	2:57:04 PM	BCl3 MFC set to  0.000000
9/5/2010	2:57:04 PM	PHl3 MFC set to  0.000000
9/5/2010	2:57:04 PM	SiCl4 MFC set to  0.000000
9/5/2010	2:57:04 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	2:57:04 PM	Tube furnace set to 0
9/5/2010	2:57:04 PM	Run finished at 2:57 PM
9/5/2010	2:57:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/5/2010	3:03:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	3:03:52 PM	Recipe started at 3:03 PM
9/5/2010	3:03:52 PM	Helium valve closed
9/5/2010	3:03:52 PM	H2 valve closed
9/5/2010	3:03:52 PM	BCl3 valve closed
9/5/2010	3:03:52 PM	PH3 valve closed
9/5/2010	3:03:52 PM	SiCl4 pre valve closed
9/5/2010	3:03:52 PM	SiCl4 post valve closed
9/5/2010	3:03:52 PM	Main Vac valve closed
9/5/2010	3:03:52 PM	Bubbler valve closed
9/5/2010	3:03:52 PM	Bypass valve opened
9/5/2010	3:03:52 PM	Helium MFC set to  0.000000
9/5/2010	3:03:52 PM	H2 MFC set to  0.000000
9/5/2010	3:03:52 PM	BCl3 MFC set to  0.000000
9/5/2010	3:03:52 PM	PHl3 MFC set to  0.000000
9/5/2010	3:03:52 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:03:52 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:03:52 PM	Tube furnace set to 0
9/5/2010	3:04:33 PM	Helium valve closed
9/5/2010	3:04:33 PM	H2 valve closed
9/5/2010	3:04:33 PM	BCl3 valve closed
9/5/2010	3:04:33 PM	PH3 valve closed
9/5/2010	3:04:33 PM	SiCl4 pre valve closed
9/5/2010	3:04:33 PM	SiCl4 post valve closed
9/5/2010	3:04:33 PM	Bubbler valve closed
9/5/2010	3:04:33 PM	Main Vac valve opened
9/5/2010	3:04:33 PM	Bypass valve opened
9/5/2010	3:04:33 PM	Helium MFC set to  0.000000
9/5/2010	3:04:33 PM	H2 MFC set to  0.000000
9/5/2010	3:04:33 PM	BCl3 MFC set to  0.000000
9/5/2010	3:04:33 PM	PHl3 MFC set to  0.000000
9/5/2010	3:04:33 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:04:33 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:04:33 PM	Tube furnace set to 0
9/5/2010	3:04:34 PM	Run finished at 3:04 PM
9/5/2010	3:04:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	3:05:35 PM	Bypass valve closed
9/5/2010	3:05:36 PM	Main Vac valve closed
9/5/2010	3:05:49 PM	Main Vac valve opened
9/5/2010	3:05:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
9/5/2010	3:06:01 PM	Recipe started at 3:05 PM
9/5/2010	3:06:01 PM	H2 valve closed
9/5/2010	3:06:01 PM	BCl3 valve closed
9/5/2010	3:06:01 PM	PH3 valve closed
9/5/2010	3:06:01 PM	SiCl4 pre valve closed
9/5/2010	3:06:01 PM	SiCl4 post valve closed
9/5/2010	3:06:01 PM	Main Vac valve closed
9/5/2010	3:06:01 PM	Bypass valve closed
9/5/2010	3:06:01 PM	Bubbler valve closed
9/5/2010	3:06:01 PM	Helium valve opened
9/5/2010	3:06:01 PM	Helium MFC set to  500.000000
9/5/2010	3:06:01 PM	H2 MFC set to  0.000000
9/5/2010	3:06:01 PM	BCl3 MFC set to  0.000000
9/5/2010	3:06:01 PM	PHl3 MFC set to  0.000000
9/5/2010	3:06:01 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:06:01 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:06:01 PM	Tube furnace set to 0
9/5/2010	3:07:21 PM	Helium valve closed
9/5/2010	3:07:21 PM	H2 valve closed
9/5/2010	3:07:21 PM	BCl3 valve closed
9/5/2010	3:07:21 PM	PH3 valve closed
9/5/2010	3:07:21 PM	SiCl4 pre valve closed
9/5/2010	3:07:21 PM	SiCl4 post valve closed
9/5/2010	3:07:21 PM	Main Vac valve closed
9/5/2010	3:07:21 PM	Bypass valve closed
9/5/2010	3:07:21 PM	Bubbler valve closed
9/5/2010	3:07:21 PM	Helium MFC set to  0.000000
9/5/2010	3:07:21 PM	H2 MFC set to  0.000000
9/5/2010	3:07:21 PM	BCl3 MFC set to  0.000000
9/5/2010	3:07:21 PM	PHl3 MFC set to  0.000000
9/5/2010	3:07:21 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:07:21 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:07:21 PM	Tube furnace set to 0
9/5/2010	3:07:36 PM	Helium valve closed
9/5/2010	3:07:36 PM	H2 valve closed
9/5/2010	3:07:36 PM	BCl3 valve closed
9/5/2010	3:07:36 PM	PH3 valve closed
9/5/2010	3:07:36 PM	SiCl4 pre valve closed
9/5/2010	3:07:36 PM	SiCl4 post valve closed
9/5/2010	3:07:36 PM	Main Vac valve closed
9/5/2010	3:07:36 PM	Bubbler valve closed
9/5/2010	3:07:36 PM	Bypass valve opened
9/5/2010	3:07:36 PM	Helium MFC set to  0.000000
9/5/2010	3:07:36 PM	H2 MFC set to  0.000000
9/5/2010	3:07:36 PM	BCl3 MFC set to  0.000000
9/5/2010	3:07:36 PM	PHl3 MFC set to  0.000000
9/5/2010	3:07:36 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:07:36 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:07:36 PM	Tube furnace set to 0
9/5/2010	3:08:05 PM	Helium valve closed
9/5/2010	3:08:05 PM	H2 valve closed
9/5/2010	3:08:05 PM	BCl3 valve closed
9/5/2010	3:08:05 PM	PH3 valve closed
9/5/2010	3:08:05 PM	SiCl4 pre valve closed
9/5/2010	3:08:05 PM	SiCl4 post valve closed
9/5/2010	3:08:05 PM	Bubbler valve closed
9/5/2010	3:08:05 PM	Main Vac valve opened
9/5/2010	3:08:05 PM	Bypass valve opened
9/5/2010	3:08:05 PM	Helium MFC set to  0.000000
9/5/2010	3:08:05 PM	H2 MFC set to  0.000000
9/5/2010	3:08:05 PM	BCl3 MFC set to  0.000000
9/5/2010	3:08:05 PM	PHl3 MFC set to  0.000000
9/5/2010	3:08:05 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:08:05 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:08:05 PM	Tube furnace set to 0
9/5/2010	3:13:05 PM	H2 valve closed
9/5/2010	3:13:05 PM	BCl3 valve closed
9/5/2010	3:13:05 PM	PH3 valve closed
9/5/2010	3:13:05 PM	SiCl4 pre valve closed
9/5/2010	3:13:05 PM	SiCl4 post valve closed
9/5/2010	3:13:05 PM	Main Vac valve closed
9/5/2010	3:13:05 PM	Bypass valve closed
9/5/2010	3:13:05 PM	Bubbler valve closed
9/5/2010	3:13:05 PM	Helium valve opened
9/5/2010	3:13:05 PM	Helium MFC set to  500.000000
9/5/2010	3:13:05 PM	H2 MFC set to  0.000000
9/5/2010	3:13:05 PM	BCl3 MFC set to  0.000000
9/5/2010	3:13:05 PM	PHl3 MFC set to  0.000000
9/5/2010	3:13:05 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:13:05 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:13:05 PM	Tube furnace set to 0
9/5/2010	3:14:24 PM	Helium valve closed
9/5/2010	3:14:24 PM	H2 valve closed
9/5/2010	3:14:24 PM	BCl3 valve closed
9/5/2010	3:14:24 PM	PH3 valve closed
9/5/2010	3:14:24 PM	SiCl4 pre valve closed
9/5/2010	3:14:24 PM	SiCl4 post valve closed
9/5/2010	3:14:24 PM	Main Vac valve closed
9/5/2010	3:14:24 PM	Bypass valve closed
9/5/2010	3:14:24 PM	Bubbler valve closed
9/5/2010	3:14:24 PM	Helium MFC set to  0.000000
9/5/2010	3:14:24 PM	H2 MFC set to  0.000000
9/5/2010	3:14:24 PM	BCl3 MFC set to  0.000000
9/5/2010	3:14:24 PM	PHl3 MFC set to  0.000000
9/5/2010	3:14:24 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:14:24 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:14:24 PM	Tube furnace set to 0
9/5/2010	3:14:39 PM	Helium valve closed
9/5/2010	3:14:39 PM	H2 valve closed
9/5/2010	3:14:39 PM	BCl3 valve closed
9/5/2010	3:14:39 PM	PH3 valve closed
9/5/2010	3:14:39 PM	SiCl4 pre valve closed
9/5/2010	3:14:39 PM	SiCl4 post valve closed
9/5/2010	3:14:39 PM	Main Vac valve closed
9/5/2010	3:14:39 PM	Bubbler valve closed
9/5/2010	3:14:39 PM	Bypass valve opened
9/5/2010	3:14:39 PM	Helium MFC set to  0.000000
9/5/2010	3:14:39 PM	H2 MFC set to  0.000000
9/5/2010	3:14:39 PM	BCl3 MFC set to  0.000000
9/5/2010	3:14:39 PM	PHl3 MFC set to  0.000000
9/5/2010	3:14:39 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:14:39 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:14:39 PM	Tube furnace set to 0
9/5/2010	3:15:08 PM	Helium valve closed
9/5/2010	3:15:08 PM	H2 valve closed
9/5/2010	3:15:08 PM	BCl3 valve closed
9/5/2010	3:15:08 PM	PH3 valve closed
9/5/2010	3:15:08 PM	SiCl4 pre valve closed
9/5/2010	3:15:08 PM	SiCl4 post valve closed
9/5/2010	3:15:08 PM	Bubbler valve closed
9/5/2010	3:15:08 PM	Main Vac valve opened
9/5/2010	3:15:08 PM	Bypass valve opened
9/5/2010	3:15:08 PM	Helium MFC set to  0.000000
9/5/2010	3:15:08 PM	H2 MFC set to  0.000000
9/5/2010	3:15:08 PM	BCl3 MFC set to  0.000000
9/5/2010	3:15:08 PM	PHl3 MFC set to  0.000000
9/5/2010	3:15:08 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:15:08 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:15:08 PM	Tube furnace set to 0
9/5/2010	3:20:08 PM	H2 valve closed
9/5/2010	3:20:08 PM	BCl3 valve closed
9/5/2010	3:20:08 PM	PH3 valve closed
9/5/2010	3:20:08 PM	SiCl4 pre valve closed
9/5/2010	3:20:08 PM	SiCl4 post valve closed
9/5/2010	3:20:08 PM	Main Vac valve closed
9/5/2010	3:20:08 PM	Bypass valve closed
9/5/2010	3:20:08 PM	Bubbler valve closed
9/5/2010	3:20:08 PM	Helium valve opened
9/5/2010	3:20:08 PM	Helium MFC set to  500.000000
9/5/2010	3:20:08 PM	H2 MFC set to  0.000000
9/5/2010	3:20:08 PM	BCl3 MFC set to  0.000000
9/5/2010	3:20:08 PM	PHl3 MFC set to  0.000000
9/5/2010	3:20:08 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:20:08 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:20:08 PM	Tube furnace set to 0
9/5/2010	3:21:26 PM	Helium valve closed
9/5/2010	3:21:26 PM	H2 valve closed
9/5/2010	3:21:26 PM	BCl3 valve closed
9/5/2010	3:21:26 PM	PH3 valve closed
9/5/2010	3:21:26 PM	SiCl4 pre valve closed
9/5/2010	3:21:26 PM	SiCl4 post valve closed
9/5/2010	3:21:26 PM	Main Vac valve closed
9/5/2010	3:21:26 PM	Bypass valve closed
9/5/2010	3:21:26 PM	Bubbler valve closed
9/5/2010	3:21:26 PM	Helium MFC set to  0.000000
9/5/2010	3:21:26 PM	H2 MFC set to  0.000000
9/5/2010	3:21:26 PM	BCl3 MFC set to  0.000000
9/5/2010	3:21:26 PM	PHl3 MFC set to  0.000000
9/5/2010	3:21:26 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:21:26 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:21:26 PM	Tube furnace set to 0
9/5/2010	3:21:42 PM	Helium valve closed
9/5/2010	3:21:42 PM	H2 valve closed
9/5/2010	3:21:42 PM	BCl3 valve closed
9/5/2010	3:21:42 PM	PH3 valve closed
9/5/2010	3:21:42 PM	SiCl4 pre valve closed
9/5/2010	3:21:42 PM	SiCl4 post valve closed
9/5/2010	3:21:42 PM	Main Vac valve closed
9/5/2010	3:21:42 PM	Bubbler valve closed
9/5/2010	3:21:42 PM	Bypass valve opened
9/5/2010	3:21:42 PM	Helium MFC set to  0.000000
9/5/2010	3:21:42 PM	H2 MFC set to  0.000000
9/5/2010	3:21:42 PM	BCl3 MFC set to  0.000000
9/5/2010	3:21:42 PM	PHl3 MFC set to  0.000000
9/5/2010	3:21:42 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:21:42 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:21:42 PM	Tube furnace set to 0
9/5/2010	3:22:10 PM	Helium valve closed
9/5/2010	3:22:10 PM	H2 valve closed
9/5/2010	3:22:10 PM	BCl3 valve closed
9/5/2010	3:22:10 PM	PH3 valve closed
9/5/2010	3:22:10 PM	SiCl4 pre valve closed
9/5/2010	3:22:10 PM	SiCl4 post valve closed
9/5/2010	3:22:10 PM	Bubbler valve closed
9/5/2010	3:22:10 PM	Main Vac valve opened
9/5/2010	3:22:10 PM	Bypass valve opened
9/5/2010	3:22:10 PM	Helium MFC set to  0.000000
9/5/2010	3:22:10 PM	H2 MFC set to  0.000000
9/5/2010	3:22:10 PM	BCl3 MFC set to  0.000000
9/5/2010	3:22:10 PM	PHl3 MFC set to  0.000000
9/5/2010	3:22:10 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:22:10 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:22:10 PM	Tube furnace set to 0
9/5/2010	3:27:10 PM	Helium valve closed
9/5/2010	3:27:10 PM	H2 valve closed
9/5/2010	3:27:10 PM	BCl3 valve closed
9/5/2010	3:27:10 PM	PH3 valve closed
9/5/2010	3:27:10 PM	SiCl4 pre valve closed
9/5/2010	3:27:10 PM	SiCl4 post valve closed
9/5/2010	3:27:10 PM	Bubbler valve closed
9/5/2010	3:27:10 PM	Main Vac valve opened
9/5/2010	3:27:10 PM	Bypass valve opened
9/5/2010	3:27:10 PM	Helium MFC set to  0.000000
9/5/2010	3:27:10 PM	H2 MFC set to  0.000000
9/5/2010	3:27:10 PM	BCl3 MFC set to  0.000000
9/5/2010	3:27:10 PM	PHl3 MFC set to  0.000000
9/5/2010	3:27:10 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:27:10 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:27:10 PM	Tube furnace set to 0
9/5/2010	3:27:11 PM	Run finished at 3:27 PM
9/5/2010	3:27:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
9/5/2010	3:48:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	3:48:23 PM	Recipe started at 3:48 PM
9/5/2010	3:48:23 PM	Helium valve closed
9/5/2010	3:48:23 PM	H2 valve closed
9/5/2010	3:48:23 PM	BCl3 valve closed
9/5/2010	3:48:23 PM	PH3 valve closed
9/5/2010	3:48:23 PM	SiCl4 pre valve closed
9/5/2010	3:48:23 PM	SiCl4 post valve closed
9/5/2010	3:48:23 PM	Main Vac valve closed
9/5/2010	3:48:23 PM	Bubbler valve closed
9/5/2010	3:48:23 PM	Bypass valve opened
9/5/2010	3:48:23 PM	Helium MFC set to  0.000000
9/5/2010	3:48:23 PM	H2 MFC set to  0.000000
9/5/2010	3:48:23 PM	BCl3 MFC set to  0.000000
9/5/2010	3:48:23 PM	PHl3 MFC set to  0.000000
9/5/2010	3:48:23 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:48:23 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:48:23 PM	Tube furnace set to 0
9/5/2010	3:48:23 PM	Helium valve closed
9/5/2010	3:48:23 PM	H2 valve closed
9/5/2010	3:48:23 PM	BCl3 valve closed
9/5/2010	3:48:23 PM	PH3 valve closed
9/5/2010	3:48:23 PM	SiCl4 pre valve closed
9/5/2010	3:48:23 PM	SiCl4 post valve closed
9/5/2010	3:48:23 PM	Bubbler valve closed
9/5/2010	3:48:23 PM	Main Vac valve opened
9/5/2010	3:48:23 PM	Bypass valve opened
9/5/2010	3:48:23 PM	Helium MFC set to  0.000000
9/5/2010	3:48:23 PM	H2 MFC set to  0.000000
9/5/2010	3:48:23 PM	BCl3 MFC set to  0.000000
9/5/2010	3:48:23 PM	PHl3 MFC set to  0.000000
9/5/2010	3:48:23 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:48:23 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:48:23 PM	Tube furnace set to 0
9/5/2010	3:49:23 PM	H2 valve closed
9/5/2010	3:49:23 PM	BCl3 valve closed
9/5/2010	3:49:23 PM	PH3 valve closed
9/5/2010	3:49:23 PM	SiCl4 pre valve closed
9/5/2010	3:49:23 PM	SiCl4 post valve closed
9/5/2010	3:49:23 PM	Bubbler valve closed
9/5/2010	3:49:23 PM	Helium valve opened
9/5/2010	3:49:23 PM	Main Vac valve opened
9/5/2010	3:49:23 PM	Bypass valve opened
9/5/2010	3:49:23 PM	Helium MFC set to  100.000000
9/5/2010	3:49:23 PM	H2 MFC set to  0.000000
9/5/2010	3:49:23 PM	BCl3 MFC set to  0.000000
9/5/2010	3:49:23 PM	PHl3 MFC set to  0.000000
9/5/2010	3:49:23 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:49:23 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:49:23 PM	Tube furnace set to 0
9/5/2010	3:58:23 PM	Helium valve closed
9/5/2010	3:58:23 PM	H2 valve closed
9/5/2010	3:58:23 PM	BCl3 valve closed
9/5/2010	3:58:23 PM	PH3 valve closed
9/5/2010	3:58:23 PM	SiCl4 pre valve closed
9/5/2010	3:58:23 PM	SiCl4 post valve closed
9/5/2010	3:58:23 PM	Bubbler valve closed
9/5/2010	3:58:23 PM	Main Vac valve opened
9/5/2010	3:58:23 PM	Bypass valve opened
9/5/2010	3:58:23 PM	Helium MFC set to  0.000000
9/5/2010	3:58:23 PM	H2 MFC set to  0.000000
9/5/2010	3:58:23 PM	BCl3 MFC set to  0.000000
9/5/2010	3:58:23 PM	PHl3 MFC set to  0.000000
9/5/2010	3:58:23 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:58:23 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:58:24 PM	Tube furnace set to 0
9/5/2010	3:59:24 PM	H2 valve closed
9/5/2010	3:59:24 PM	BCl3 valve closed
9/5/2010	3:59:24 PM	PH3 valve closed
9/5/2010	3:59:24 PM	SiCl4 pre valve closed
9/5/2010	3:59:24 PM	SiCl4 post valve closed
9/5/2010	3:59:24 PM	Bubbler valve closed
9/5/2010	3:59:24 PM	Helium valve opened
9/5/2010	3:59:24 PM	Main Vac valve opened
9/5/2010	3:59:24 PM	Bypass valve opened
9/5/2010	3:59:24 PM	Helium MFC set to  100.000000
9/5/2010	3:59:24 PM	H2 MFC set to  0.000000
9/5/2010	3:59:24 PM	BCl3 MFC set to  0.000000
9/5/2010	3:59:24 PM	PHl3 MFC set to  0.000000
9/5/2010	3:59:24 PM	SiCl4 MFC set to  0.000000
9/5/2010	3:59:24 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	3:59:24 PM	Tube furnace set to 0
9/5/2010	4:08:24 PM	Helium valve closed
9/5/2010	4:08:24 PM	H2 valve closed
9/5/2010	4:08:24 PM	BCl3 valve closed
9/5/2010	4:08:24 PM	PH3 valve closed
9/5/2010	4:08:24 PM	SiCl4 pre valve closed
9/5/2010	4:08:24 PM	SiCl4 post valve closed
9/5/2010	4:08:24 PM	Bubbler valve closed
9/5/2010	4:08:24 PM	Main Vac valve opened
9/5/2010	4:08:24 PM	Bypass valve opened
9/5/2010	4:08:24 PM	Helium MFC set to  0.000000
9/5/2010	4:08:24 PM	H2 MFC set to  0.000000
9/5/2010	4:08:24 PM	BCl3 MFC set to  0.000000
9/5/2010	4:08:24 PM	PHl3 MFC set to  0.000000
9/5/2010	4:08:24 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:08:24 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:08:24 PM	Tube furnace set to 0
9/5/2010	4:09:24 PM	H2 valve closed
9/5/2010	4:09:24 PM	BCl3 valve closed
9/5/2010	4:09:24 PM	PH3 valve closed
9/5/2010	4:09:24 PM	SiCl4 pre valve closed
9/5/2010	4:09:24 PM	SiCl4 post valve closed
9/5/2010	4:09:24 PM	Bubbler valve closed
9/5/2010	4:09:24 PM	Helium valve opened
9/5/2010	4:09:24 PM	Main Vac valve opened
9/5/2010	4:09:24 PM	Bypass valve opened
9/5/2010	4:09:24 PM	Helium MFC set to  100.000000
9/5/2010	4:09:24 PM	H2 MFC set to  0.000000
9/5/2010	4:09:24 PM	BCl3 MFC set to  0.000000
9/5/2010	4:09:24 PM	PHl3 MFC set to  0.000000
9/5/2010	4:09:24 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:09:24 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:09:24 PM	Tube furnace set to 0
9/5/2010	4:18:24 PM	Helium valve closed
9/5/2010	4:18:24 PM	H2 valve closed
9/5/2010	4:18:24 PM	BCl3 valve closed
9/5/2010	4:18:24 PM	PH3 valve closed
9/5/2010	4:18:24 PM	SiCl4 pre valve closed
9/5/2010	4:18:24 PM	SiCl4 post valve closed
9/5/2010	4:18:24 PM	Bubbler valve closed
9/5/2010	4:18:24 PM	Main Vac valve opened
9/5/2010	4:18:24 PM	Bypass valve opened
9/5/2010	4:18:24 PM	Helium MFC set to  0.000000
9/5/2010	4:18:24 PM	H2 MFC set to  0.000000
9/5/2010	4:18:24 PM	BCl3 MFC set to  0.000000
9/5/2010	4:18:24 PM	PHl3 MFC set to  0.000000
9/5/2010	4:18:24 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:18:24 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:18:24 PM	Tube furnace set to 0
9/5/2010	4:18:25 PM	Run finished at 4:18 PM
9/5/2010	4:18:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	4:24:58 PM	Bypass valve closed
9/5/2010	4:25:00 PM	Main Vac valve closed
9/5/2010	4:25:08 PM	Main Vac valve opened
9/5/2010	4:26:16 PM	Main Vac valve closed
9/5/2010	4:26:24 PM	Main Vac valve opened
9/5/2010	4:50:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	4:50:48 PM	Recipe started at 4:50 PM
9/5/2010	4:50:48 PM	Helium valve closed
9/5/2010	4:50:48 PM	H2 valve closed
9/5/2010	4:50:48 PM	BCl3 valve closed
9/5/2010	4:50:48 PM	PH3 valve closed
9/5/2010	4:50:48 PM	SiCl4 pre valve closed
9/5/2010	4:50:48 PM	SiCl4 post valve closed
9/5/2010	4:50:48 PM	Main Vac valve closed
9/5/2010	4:50:48 PM	Bubbler valve closed
9/5/2010	4:50:48 PM	Bypass valve opened
9/5/2010	4:50:48 PM	Helium MFC set to  0.000000
9/5/2010	4:50:48 PM	H2 MFC set to  0.000000
9/5/2010	4:50:48 PM	BCl3 MFC set to  0.000000
9/5/2010	4:50:48 PM	PHl3 MFC set to  0.000000
9/5/2010	4:50:48 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:50:48 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:50:48 PM	Tube furnace set to 0
9/5/2010	4:50:48 PM	Helium valve closed
9/5/2010	4:50:48 PM	H2 valve closed
9/5/2010	4:50:48 PM	BCl3 valve closed
9/5/2010	4:50:48 PM	PH3 valve closed
9/5/2010	4:50:48 PM	SiCl4 pre valve closed
9/5/2010	4:50:48 PM	SiCl4 post valve closed
9/5/2010	4:50:48 PM	Bubbler valve closed
9/5/2010	4:50:48 PM	Main Vac valve opened
9/5/2010	4:50:48 PM	Bypass valve opened
9/5/2010	4:50:48 PM	Helium MFC set to  0.000000
9/5/2010	4:50:48 PM	H2 MFC set to  0.000000
9/5/2010	4:50:48 PM	BCl3 MFC set to  0.000000
9/5/2010	4:50:48 PM	PHl3 MFC set to  0.000000
9/5/2010	4:50:48 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:50:48 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:50:49 PM	Tube furnace set to 0
9/5/2010	4:51:49 PM	H2 valve closed
9/5/2010	4:51:49 PM	BCl3 valve closed
9/5/2010	4:51:49 PM	PH3 valve closed
9/5/2010	4:51:49 PM	SiCl4 pre valve closed
9/5/2010	4:51:49 PM	SiCl4 post valve closed
9/5/2010	4:51:49 PM	Bubbler valve closed
9/5/2010	4:51:49 PM	Helium valve opened
9/5/2010	4:51:49 PM	Main Vac valve opened
9/5/2010	4:51:49 PM	Bypass valve opened
9/5/2010	4:51:49 PM	Helium MFC set to  100.000000
9/5/2010	4:51:49 PM	H2 MFC set to  0.000000
9/5/2010	4:51:49 PM	BCl3 MFC set to  0.000000
9/5/2010	4:51:49 PM	PHl3 MFC set to  0.000000
9/5/2010	4:51:49 PM	SiCl4 MFC set to  0.000000
9/5/2010	4:51:49 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	4:51:49 PM	Tube furnace set to 0
9/5/2010	5:00:49 PM	Helium valve closed
9/5/2010	5:00:49 PM	H2 valve closed
9/5/2010	5:00:49 PM	BCl3 valve closed
9/5/2010	5:00:49 PM	PH3 valve closed
9/5/2010	5:00:49 PM	SiCl4 pre valve closed
9/5/2010	5:00:49 PM	SiCl4 post valve closed
9/5/2010	5:00:49 PM	Bubbler valve closed
9/5/2010	5:00:49 PM	Main Vac valve opened
9/5/2010	5:00:49 PM	Bypass valve opened
9/5/2010	5:00:49 PM	Helium MFC set to  0.000000
9/5/2010	5:00:49 PM	H2 MFC set to  0.000000
9/5/2010	5:00:49 PM	BCl3 MFC set to  0.000000
9/5/2010	5:00:49 PM	PHl3 MFC set to  0.000000
9/5/2010	5:00:49 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:00:49 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:00:49 PM	Tube furnace set to 0
9/5/2010	5:01:49 PM	H2 valve closed
9/5/2010	5:01:49 PM	BCl3 valve closed
9/5/2010	5:01:49 PM	PH3 valve closed
9/5/2010	5:01:49 PM	SiCl4 pre valve closed
9/5/2010	5:01:49 PM	SiCl4 post valve closed
9/5/2010	5:01:49 PM	Bubbler valve closed
9/5/2010	5:01:49 PM	Helium valve opened
9/5/2010	5:01:49 PM	Main Vac valve opened
9/5/2010	5:01:49 PM	Bypass valve opened
9/5/2010	5:01:49 PM	Helium MFC set to  100.000000
9/5/2010	5:01:49 PM	H2 MFC set to  0.000000
9/5/2010	5:01:49 PM	BCl3 MFC set to  0.000000
9/5/2010	5:01:49 PM	PHl3 MFC set to  0.000000
9/5/2010	5:01:49 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:01:49 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:01:49 PM	Tube furnace set to 0
9/5/2010	5:10:49 PM	Helium valve closed
9/5/2010	5:10:49 PM	H2 valve closed
9/5/2010	5:10:49 PM	BCl3 valve closed
9/5/2010	5:10:49 PM	PH3 valve closed
9/5/2010	5:10:49 PM	SiCl4 pre valve closed
9/5/2010	5:10:49 PM	SiCl4 post valve closed
9/5/2010	5:10:49 PM	Bubbler valve closed
9/5/2010	5:10:49 PM	Main Vac valve opened
9/5/2010	5:10:49 PM	Bypass valve opened
9/5/2010	5:10:49 PM	Helium MFC set to  0.000000
9/5/2010	5:10:49 PM	H2 MFC set to  0.000000
9/5/2010	5:10:49 PM	BCl3 MFC set to  0.000000
9/5/2010	5:10:49 PM	PHl3 MFC set to  0.000000
9/5/2010	5:10:49 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:10:49 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:10:49 PM	Tube furnace set to 0
9/5/2010	5:11:49 PM	H2 valve closed
9/5/2010	5:11:49 PM	BCl3 valve closed
9/5/2010	5:11:49 PM	PH3 valve closed
9/5/2010	5:11:49 PM	SiCl4 pre valve closed
9/5/2010	5:11:49 PM	SiCl4 post valve closed
9/5/2010	5:11:49 PM	Bubbler valve closed
9/5/2010	5:11:49 PM	Helium valve opened
9/5/2010	5:11:49 PM	Main Vac valve opened
9/5/2010	5:11:49 PM	Bypass valve opened
9/5/2010	5:11:49 PM	Helium MFC set to  100.000000
9/5/2010	5:11:49 PM	H2 MFC set to  0.000000
9/5/2010	5:11:49 PM	BCl3 MFC set to  0.000000
9/5/2010	5:11:49 PM	PHl3 MFC set to  0.000000
9/5/2010	5:11:49 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:11:49 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:11:49 PM	Tube furnace set to 0
9/5/2010	5:20:50 PM	Helium valve closed
9/5/2010	5:20:50 PM	H2 valve closed
9/5/2010	5:20:50 PM	BCl3 valve closed
9/5/2010	5:20:50 PM	PH3 valve closed
9/5/2010	5:20:50 PM	SiCl4 pre valve closed
9/5/2010	5:20:50 PM	SiCl4 post valve closed
9/5/2010	5:20:50 PM	Bubbler valve closed
9/5/2010	5:20:50 PM	Main Vac valve opened
9/5/2010	5:20:50 PM	Bypass valve opened
9/5/2010	5:20:50 PM	Helium MFC set to  0.000000
9/5/2010	5:20:50 PM	H2 MFC set to  0.000000
9/5/2010	5:20:50 PM	BCl3 MFC set to  0.000000
9/5/2010	5:20:50 PM	PHl3 MFC set to  0.000000
9/5/2010	5:20:50 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:20:50 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:20:50 PM	Tube furnace set to 0
9/5/2010	5:20:51 PM	Run finished at 5:20 PM
9/5/2010	5:20:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
9/5/2010	5:31:57 PM	Recipe started at 5:31 PM
9/5/2010	5:31:57 PM	Helium valve closed
9/5/2010	5:31:57 PM	BCl3 valve closed
9/5/2010	5:31:57 PM	PH3 valve closed
9/5/2010	5:31:57 PM	SiCl4 pre valve closed
9/5/2010	5:31:57 PM	SiCl4 post valve closed
9/5/2010	5:31:57 PM	Main Vac valve closed
9/5/2010	5:31:57 PM	Bypass valve closed
9/5/2010	5:31:57 PM	Bubbler valve closed
9/5/2010	5:31:57 PM	H2 valve opened
9/5/2010	5:31:57 PM	Helium MFC set to  0.000000
9/5/2010	5:31:57 PM	H2 MFC set to  500.000000
9/5/2010	5:31:57 PM	BCl3 MFC set to  0.000000
9/5/2010	5:31:57 PM	PHl3 MFC set to  0.000000
9/5/2010	5:31:57 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:31:57 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:31:57 PM	Tube furnace set to 0
9/5/2010	5:33:19 PM	Helium valve closed
9/5/2010	5:33:19 PM	BCl3 valve closed
9/5/2010	5:33:19 PM	PH3 valve closed
9/5/2010	5:33:19 PM	SiCl4 pre valve closed
9/5/2010	5:33:19 PM	SiCl4 post valve closed
9/5/2010	5:33:19 PM	Main Vac valve closed
9/5/2010	5:33:19 PM	Bypass valve closed
9/5/2010	5:33:19 PM	H2 valve opened
9/5/2010	5:33:19 PM	Bubbler valve opened
9/5/2010	5:33:19 PM	Helium MFC set to  0.000000
9/5/2010	5:33:19 PM	H2 MFC set to  500.000000
9/5/2010	5:33:19 PM	BCl3 MFC set to  0.000000
9/5/2010	5:33:19 PM	PHl3 MFC set to  0.000000
9/5/2010	5:33:19 PM	SiCl4 MFC set to  0.000000
9/5/2010	5:33:19 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:33:19 PM	Tube furnace set to 1050
9/5/2010	5:53:19 PM	Helium valve closed
9/5/2010	5:53:19 PM	BCl3 valve closed
9/5/2010	5:53:19 PM	Main Vac valve closed
9/5/2010	5:53:19 PM	Bypass valve closed
9/5/2010	5:53:19 PM	H2 valve opened
9/5/2010	5:53:19 PM	PH3 valve opened
9/5/2010	5:53:19 PM	SiCl4 pre valve opened
9/5/2010	5:53:19 PM	SiCl4 post valve opened
9/5/2010	5:53:19 PM	Bubbler valve opened
9/5/2010	5:53:19 PM	Helium MFC set to  0.000000
9/5/2010	5:53:19 PM	H2 MFC set to  500.000000
9/5/2010	5:53:19 PM	BCl3 MFC set to  0.000000
9/5/2010	5:53:19 PM	PHl3 MFC set to  1.000000
9/5/2010	5:53:19 PM	SiCl4 MFC set to  50.000000
9/5/2010	5:53:19 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	5:53:19 PM	Tube furnace set to 1050
9/5/2010	6:13:19 PM	H2 valve closed
9/5/2010	6:13:19 PM	BCl3 valve closed
9/5/2010	6:13:19 PM	PH3 valve closed
9/5/2010	6:13:19 PM	SiCl4 pre valve closed
9/5/2010	6:13:19 PM	SiCl4 post valve closed
9/5/2010	6:13:19 PM	Main Vac valve closed
9/5/2010	6:13:19 PM	Bypass valve closed
9/5/2010	6:13:19 PM	Helium valve opened
9/5/2010	6:13:19 PM	Bubbler valve opened
9/5/2010	6:13:19 PM	Helium MFC set to  500.000000
9/5/2010	6:13:19 PM	H2 MFC set to  0.000000
9/5/2010	6:13:19 PM	BCl3 MFC set to  0.000000
9/5/2010	6:13:19 PM	PHl3 MFC set to  0.000000
9/5/2010	6:13:19 PM	SiCl4 MFC set to  0.000000
9/5/2010	6:13:19 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	6:13:20 PM	Tube furnace set to 0
9/5/2010	6:33:20 PM	Helium valve closed
9/5/2010	6:33:20 PM	H2 valve closed
9/5/2010	6:33:20 PM	BCl3 valve closed
9/5/2010	6:33:20 PM	PH3 valve closed
9/5/2010	6:33:20 PM	SiCl4 pre valve closed
9/5/2010	6:33:20 PM	SiCl4 post valve closed
9/5/2010	6:33:20 PM	Main Vac valve closed
9/5/2010	6:33:20 PM	Bypass valve closed
9/5/2010	6:33:20 PM	Bubbler valve closed
9/5/2010	6:33:20 PM	Helium MFC set to  0.000000
9/5/2010	6:33:20 PM	H2 MFC set to  0.000000
9/5/2010	6:33:20 PM	BCl3 MFC set to  0.000000
9/5/2010	6:33:20 PM	PHl3 MFC set to  0.000000
9/5/2010	6:33:20 PM	SiCl4 MFC set to  0.000000
9/5/2010	6:33:20 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	6:33:20 PM	Tube furnace set to 0
9/5/2010	6:33:20 PM	Run finished at 6:33 PM
9/5/2010	6:42:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	6:42:36 PM	Recipe started at 6:42 PM
9/5/2010	6:42:36 PM	Helium valve closed
9/5/2010	6:42:36 PM	H2 valve closed
9/5/2010	6:42:36 PM	BCl3 valve closed
9/5/2010	6:42:36 PM	PH3 valve closed
9/5/2010	6:42:36 PM	SiCl4 pre valve closed
9/5/2010	6:42:36 PM	SiCl4 post valve closed
9/5/2010	6:42:36 PM	Main Vac valve closed
9/5/2010	6:42:36 PM	Bubbler valve closed
9/5/2010	6:42:36 PM	Bypass valve opened
9/5/2010	6:42:36 PM	Helium MFC set to  0.000000
9/5/2010	6:42:36 PM	H2 MFC set to  0.000000
9/5/2010	6:42:36 PM	BCl3 MFC set to  0.000000
9/5/2010	6:42:36 PM	PHl3 MFC set to  0.000000
9/5/2010	6:42:36 PM	SiCl4 MFC set to  0.000000
9/5/2010	6:42:36 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	6:42:36 PM	Tube furnace set to 0
9/5/2010	6:43:17 PM	Helium valve closed
9/5/2010	6:43:17 PM	H2 valve closed
9/5/2010	6:43:17 PM	BCl3 valve closed
9/5/2010	6:43:17 PM	PH3 valve closed
9/5/2010	6:43:17 PM	SiCl4 pre valve closed
9/5/2010	6:43:17 PM	SiCl4 post valve closed
9/5/2010	6:43:17 PM	Bubbler valve closed
9/5/2010	6:43:17 PM	Main Vac valve opened
9/5/2010	6:43:17 PM	Bypass valve opened
9/5/2010	6:43:17 PM	Helium MFC set to  0.000000
9/5/2010	6:43:17 PM	H2 MFC set to  0.000000
9/5/2010	6:43:17 PM	BCl3 MFC set to  0.000000
9/5/2010	6:43:17 PM	PHl3 MFC set to  0.000000
9/5/2010	6:43:17 PM	SiCl4 MFC set to  0.000000
9/5/2010	6:43:17 PM	Bypass solenoid MFC set to  0.000000
9/5/2010	6:43:17 PM	Tube furnace set to 0
9/5/2010	6:43:17 PM	Run finished at 6:43 PM
9/5/2010	6:43:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/5/2010	6:44:41 PM	Bypass valve closed
9/5/2010	6:44:43 PM	Main Vac valve closed
9/5/2010	6:44:51 PM	Main Vac valve opened
